Gas Business Department

BSGS (Bulk Specialty Gas System)

Product Features

This is a supply equipment that supplies large capacity (Y cylinder or gas vehicle)
special gas for semiconductors and ensures site safety through automatic emergency
shut off and fire extinguishing in case of emergency.

- Automatic supply change method (Auto Change Type)
- Customization: 1 by 1 or 2 by 2 / Two Process train
- PLC + Touch Screen based automation system (OMRON, AB, SIEMENS)
- Trailer, Tank Lorry, Ton/ Y-Cylinder supply container
- 200~2000SLPM (Max. Flow Rate@N2 Gas), 0.1~0.9MPa, ¾” or 1” Tube Stub
- User setting available for all alarms
- Emergency stop (EMO), exhaust pressure monitoring ,
- S-Mark safety Certification , safety certification for specific pneumatic gases (Korea , China , U.S.)
- Support for communication for higher-level monitoring
- Explosion- proof certification (flammability), earthquake -resistant design (Richter scale 7)

Additional specifications

Weight Scale / Heating Line
UVIR / Jacket Heater
High Temp Sensor / Valve Shutter