Gas Business Department

Gas Cabinet

Product Features

This equipment supplies special gas for semiconductors in cylinders and
ensures site safety through automatic emergency shutoff and fire extinguishing in case of emergency.

- Automatic supply change method (Auto Change Type)
- PLC + Touch Screen based automation system (OMRON, AB, SIEMENS)
- Supply container of 49~54 Liter or less , Customization: 1B/T~3B/T
- 30SLPM (Max. Flow Rate@N2 Gas), 0.1~0.9Mpa, ¼” or ½”Tube Stub
- Max. 2,500 psig (High pressure gases, ≥150 psig), Max. 150 psig (Low pressure gases, ≤ 150 psig)
- User settings for all alarms
- Emergency stop (EMO), exhaust pressure monitoring
- S-Mark safety certification , specific high-pressure gas safety certification (Korea , China , US)
- Explosion - proof certification (flammability), earthquake-resistant design (Richter scale 7)

Additional specifications

Weight Scale / Heating Line
UVIR/Jacket Heater
High Temp Sensor/Valve Shutter
Leak Detector/Lamp