Chemical Business Department

Liquid Chemicals Systems

Product Features

- Vapor system Liquid of high purity precursor cast Reaction by vaporizing
chamber Fully controlled so that it can be used stably automation
equipment It means.

- High purity liquid precursor Each Purge solution according to its characteristics this applied There is , perfect purge cleani ng Implements.

- PLC and Touch screen stable using control and user convenience provide.

- Controll _ box We maintain stable supply by applying a pressure explosion-proof structure. equipment Domestic explosion proof certification for itself (KC s) Obtain and respond to emergencies it's possible.

- Fire and Leak Implementation of self-extinguishing function in preparation for.