Gas Business Department

VMB (Valve Manifold Box)

Product Features

This equipment distributes special gas for semiconductors to each process and
ensures site safety through automatic emergency shutdown and fire extinguishing in case of emergency.

- Inlet 1 ~ 2 & Outlet 4 ~ 12, Customization: 1x4~1x12 type
- PLC + Touch Screen based automation system (OMRON, AB, SIEMENS)
- Proven for all aspects of operation and maintenance automation sequence
- 1~100SLPM (Max.Flow Rate@N2 Gas), 0.1~0.68MPa, ¼” or ½”Tube Stub
- Design Pressure: Max. 150 psig (Low pressure gases, ≤ 150 psig)
- Emergency stop (EMO), DC Power Module 2 neutralization
- S-Mark safety certification , specific pneumatic gas safety certification (Korea , China , US)
- Explosion proof certification (flammability), earthquake -resistant design (Richter scale 7)

Additional specifications

Heating Line / UVIR
High Temp Sensor/Leak Detector
Lamp