Corporate Information
Business Areas
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Liquid Chemicals Systems
BCD [PLDS-V1 100 and 200]
Product Features
Large-scale refill chemical supply system for Bulk 240L (55 gallons) or more that safely and stably supplies chemicals used in semiconductor and display manufacturing processes
Continuous supply of chemicals and leak prevention with dual containment system
PLDS-VMB (Valve Manifold Box)
Product Features
System for multiple distribution equipment supplied from BCD that safely and stably supplies chemicals, performing multiple distribution roles, preventing cross-contamination, and distributing UHP (ultra-high purity) liquid [chemicals]
LDS [PLDS-V1]
Product Features
System that supplies liquid chemicals from Process canister to process tools at constant pressure using push gas
Maintains constant Chemical Level (Refill from Bulk Canister) for continuous supply
Operates by replacing Bulk Canister when Empty level is reached
- Precise liquid control: Supply amount control through flow sensors and valves
- Automation function: PLC-based automation controller application
- Process optimization: Purge and cleanliness maintenance functions equipped
- Enhanced safety: Leak detection, emergency shutdown (EMO), Dual Canister (Bulk/Process) application.
Auxiliary Equipment
Vacuum Pump
Scrubber Option
[Burn-Wet / Dry / Plasma-Wet]
