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Gas Cabinet

Product Features

Equipment for supplying specialty gases for semiconductors from cylinders, ensuring site safety through automatic emergency shutdown and fire suppression in emergency situations.

  • Automatic supply switching method (Auto Change Type) - PLC + Touch Screen based automation system
    (OMRON, AB, SIEMENS) - Supply containers of 49~54 liters or less, Customization: 1B/T~3B/T
  • 30SLPM (Max. Flow Rate@N2 Gas), 0.1~0.9Mpa, ¼” or ½”Tube Stub
  • Max. 2,500 psig (High pressure gases, ≥150 psig), Max. 150 psig (Low pressure gases, ≤ 150 psig)
  • User-configurable for all alarms - Emergency stop (EMO), exhaust pressure monitoring - S-Mark safety certification
  • Specific high-pressure gas safety certification (Korea, China, USA) - Explosion-proof certification (flammable), seismic design (Richter scale 7)

Additional Specifications

  • Weight Scale / Heating Line
  • UVIR/Jacket Heater
  • High Temp Sensor/Valve Shutter
  • Leak Detector/Lamp

BSGS (Bulk Specialty Gas System)

Product Features

Supply equipment for supplying large quantities of specialty gases for semiconductors (Y-cylinders or gas vehicles), ensuring site safety through automatic emergency shutdown and fire suppression in emergency situations.

  • Automatic supply switching method (Auto Change Type)
  • Customization: 1 by 1 or 2 by 2 / Two Process train
  • PLC + Touch Screen based automation system (OMRON, AB, SIEMENS)
  • Trailer, Tank Lorry, Ton/ Y-Cylinder supply containers
  • 200~2000SLPM (Max. Flow Rate@N2 Gas), 0.1~0.9MPa, ¾" or 1" Tube Stub
  • User-configurable for all alarms
  • Emergency stop (EMO), exhaust pressure monitoring
  • S-Mark safety certification, specific compressed gas safety certification (Korea, China, USA)
  • Communication support for upper monitoring
  • Explosion-proof certification (flammable), seismic design (Richter scale 7)

Additional Specifications

  • Weight Scale / Heating Line
  • UVIR / Jacket Heater
  • High Temp Sensor / Valve Shutter

VMB (Valve Manifold Box)

Product Features

Equipment for distributing specialty gases for semiconductors to each process, ensuring site safety through automatic emergency shutdown and fire suppression in emergency situations.

  • Inlet 1~2 & Outlet 4~12, Customization: 1x4~1x12 type - PLC + Touch Screen based automation system (OMRON, AB, SIEMENS)
  • Proven automation sequence for all aspects of operation and maintenance
  • 1~100SLPM (Max. Flow Rate@N2 Gas), 0.1~0.68MPa, ¼” or ½” Tube Stub
  • Design Pressure: Max. 150 psig (Low pressure gases, ≤ 150 psig)
  • Emergency stop (EMO), dual DC Power Module
  • S-Mark safety certification, specific compressed gas safety certification (Korea, China, USA)
  • Explosion-proof certification (flammable), seismic design (Richter scale 7)

Additional Specifications

  • Heating Line / UVIR
  • High Temp Sensor/Leak Detector
  • Lamp
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